Title :
An equivalent circuit model for curved piezoelectric micromachined ultrasonic transducers with spherical-shape diaphragms
Author :
Akhbari, Sina ; Sammoura, Firas ; Liwei Lin
Author_Institution :
Mech. Eng. Dept., UC Berkeley, Berkeley, CA, USA
Abstract :
An equivalent circuit model is analytically derived for a clamped piezoelectric elastic shell with a spherical curved shape. The lumped parameters of the electromechanical elements are extracted from the system equations, and the analytical circuit model is compared with acoustic-piezoelectric FEM simulation results. Very good consistencies are achieved in the frequency responses, electromechanical coupled variations, and the device input impedances.
Keywords :
equivalent circuits; finite element analysis; piezoelectric transducers; ultrasonic transducers; acoustic-piezoelectric FEM simulation; analytical circuit model; clamped piezoelectric elastic shell; curved piezoelectric micromachined ultrasonic transducers; device input impedance; electromechanical coupled variations; electromechanical elements; equivalent circuit model; frequency response; lumped parameters; spherical shape diaphragms; system equations; Acoustics; Analytical models; Equivalent circuits; Integrated circuit modeling; Mathematical model; Transducers; Ultrasonic transducers; curved pMUT; equivalent circuit model; piezoelectric elastic shells; piezoelectric micromachined ultrasonic transducer;
Conference_Titel :
Ultrasonics Symposium (IUS), 2014 IEEE International
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.2014.0074
