Title :
A novel MEMS gas sensor based on ultrasonic resonance cavity
Author :
Koppinen, P.J. ; Sillanpaa, T. ; Karkkainen, Anu ; Saarilahti, Jaakko ; Seppa, Heikki
Author_Institution :
Knowledge Intensive Products & Services (KIPS), VTT Tech. Res. Centre of Finland, Espoo, Finland
Abstract :
We present a novel low-cost and low-power MEMS gas sensor concept based on an ultrasonic resonance cavity. The sensor consists of a capacitive micromachined ultrasonic transducer (CMUT) embedded to an acoustic resonance cavity. The sensor operation was demonstrated with carbon dioxide CO2 and methane CH4, the lowest resolvable concentrations are about 10 - 20 ppm - a competitive result with the existing commercially available CO2 sensors. In addition, the sensor is able to measure gas concentration and humidity independently, and thus can be used as a combo sensor for gas concentrations and humidity.
Keywords :
acoustic resonators; carbon compounds; gas sensors; microsensors; ultrasonic transducers; CO2; MEMS gas sensor; capacitive micromachined ultrasonic transducer; carbon dioxide sensors; humidity measurement; low cost sensor; low power sensor; ultrasonic resonance cavity; Acoustics; Cavity resonators; Humidity; Impedance; Resonant frequency; Transducers; Ultrasonic variables measurement;
Conference_Titel :
Ultrasonics Symposium (IUS), 2014 IEEE International
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.2014.0161
