Title :
Exploring the novel characteristics of hetero-material gate field-effect transistors (HMGFETs) with gate-material engineering
Author_Institution :
Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore
fDate :
1/1/2000 12:00:00 AM
Abstract :
The novel characteristics of a new type of MOSFET, the hetero-material gate field-effect transistor (HMGFET), are explored theoretically and compared with those of the compatible MOSFET. Two conceptual processes for realizing the HMG structure are proposed for integration into the existing silicon technology. The two-dimensional (2-D) numerical simulations reveal that the HMGFET demonstrates extended threshold voltage roll-off to much smaller length and shows simultaneous transconductance enhancement and suppression of short-channel effects (SCEs) [drain-induced barrier-lowering (DIBL) and channel-length modulation (CLM)] and, more importantly, these unique features could be controlled by engineering the material and length of the gate. This work demonstrates a new way of engineering ultrasmall transistors and provides the incentive and guide for experimental exploration
Keywords :
MOS integrated circuits; MOSFET; ULSI; carrier mobility; masks; semiconductor device models; 2D numerical simulations; MOSFET; Si; channel-length modulation; drain-induced barrier-lowering; extended threshold voltage roll-off; gate-material engineering; hetero-material gate field-effect transistors; short-channel effects; transconductance enhancement; ultrasmall transistors; Doping; FETs; MOSFET circuits; Numerical simulation; Silicon; Space technology; Threshold voltage; Transconductance; Two dimensional displays; Ultra large scale integration;
Journal_Title :
Electron Devices, IEEE Transactions on