DocumentCode :
1291963
Title :
Effect of Dust Particle Growth on the Emission Spectrum of a Complex Plasma
Author :
Layden, Brett ; Cheung, Vincent ; Samarian, Alexander A.
Author_Institution :
Sch. of Phys., Univ. of Sydney, Sydney, NSW, Australia
Volume :
39
Issue :
11
fYear :
2011
Firstpage :
2762
Lastpage :
2763
Abstract :
The growth of dust particles in a plasma can drastically change the plasma´s properties; importantly, it can affect the electron energy distribution function. We have performed optical emission spectroscopy on an RF sputtering discharge in argon during dust particle growth to analyze this change. We find that the intensities of all of the argon emission lines increase, indicating an increase in the number of high-energy electrons as a result of dust growth.
Keywords :
argon; dusty plasmas; high-frequency discharges; plasma transport processes; Ar; RF sputtering discharge; argon emission lines; complex plasma; dust particle growth effect; electron energy distribution function; emission spectrum; high-energy electron analysis; optical emission spectroscopy; Argon; Discharges; Ions; Plasmas; Spectroscopy; Sputtering; Complex plasma; dust particle growth; dusty plasma; electron energy distribution function (EEDF); optical emission spectroscopy; plasma emission;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2011.2160288
Filename :
5976461
Link To Document :
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