DocumentCode :
1292006
Title :
Limits to the size of semiconductor devices
Author :
Wilson, B.L.H.
Author_Institution :
Plessey Research (Caswell) Limited, Allen Clark Research Centre, Towcester, UK
Volume :
26
Issue :
9
fYear :
1980
fDate :
9/1/1980 12:00:00 AM
Firstpage :
704
Lastpage :
708
Abstract :
Component density on integrated circuits continues to increase at a high rate. What are the limitations to miniaturisation of components, and by what means are these limits pushed back?
fLanguage :
English
Journal_Title :
Electronics and Power
Publisher :
iet
ISSN :
0013-5127
Type :
jour
DOI :
10.1049/ep.1980.0372
Filename :
5197880
Link To Document :
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