Title :
Design and characterisation of a combined pressure, temperature, ID sensor for harsh environment
Author :
Binder, Andreas ; Bardong, J. ; Bruckner, G.
Author_Institution :
Carinthian Tech Res. AG, Villach, Austria
Abstract :
A combined pressure, temperature sensor with RFID functionality and wireless readout has been developed. The concept is based on a delay line on YZ-cut Lithiumniobate, which allows for a wireless interrogation in the 2.4 GHz ISM band. The sensor exhibits good sensitivity and linearity to pressure, but also a significant temperature dependence of pressure sensitivity. Due to mismatch of thermal expansion factors the sensor has a small offset drift with temperature. Both effects can be corrected using the inherent temperature information of the sensor. The sensor has been characterized from 20 °C to 180 °C. The measured pressure sensitivity is 5.3 rad/bar at 20 °C and 4.2 rad/bar at 180 °C. The sensor is intended for applications in the food and pharmaceutical industry.
Keywords :
acoustic measurement; pressure sensors; radiofrequency identification; surface acoustic wave sensors; temperature sensors; ID sensor; RFID functionality; harsh environment; linearity; pressure sensor; sensitivity; temperature 20 degC to 180 degC; temperature sensor; wireless interrogation; Delay lines; Sensitivity; Surface acoustic waves; Temperature; Temperature measurement; Temperature sensors; Lithiumniobate; SAW based RFID; SAW pressure sensor; SAW temperature sensor;
Conference_Titel :
Ultrasonics Symposium (IUS), 2014 IEEE International
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.2014.0374
