Title :
Air-gap stacked spiral inductor
Author :
Paek, Seung Won ; Seo, Kwang Seok
fDate :
10/1/1997 12:00:00 AM
Abstract :
In this letter, we propose an air-gap stacked spiral inductor using air-bridge technology. By stacking metal lines, inductor area can be reduced by 25%-5% compared with conventional spiral inductors. The air-gap structure yields low parasitic capacitance, so that the resonance frequency is higher than that of conventional inductor in spite of the reduced interwire distance
Keywords :
MMIC; inductors; integrated circuit technology; MMIC application; air-bridge technology; air-gap stacked spiral inductor; low parasitic capacitance; metal lines; resonance frequency; Air gaps; Dielectric materials; Fabrication; Inductance; Inductors; Parasitic capacitance; Resonance; Resonant frequency; Space technology; Spirals;
Journal_Title :
Microwave and Guided Wave Letters, IEEE
