Title :
Broadband tunable excimer lasers
Author :
Wilson, William L., Jr. ; Tittel, Frank K. ; Nighan, William
Author_Institution :
Dept. of Electr. & Comput. Eng., Rice Univ., Houston, TX, USA
Abstract :
The authors examine in detail the various classes of excimer lasers, the way in which they operate, performance criteria, and applications.
Keywords :
excimer lasers; laser tuning; reviews; broadband operation; excimer lasers; laser tuning; performance criteria; reviews; Argon; Chemical lasers; Gas lasers; Laser applications; Laser excitation; Pump lasers; Xenon;
Journal_Title :
Circuits and Devices Magazine, IEEE
DOI :
10.1109/MCD.1985.6311925
