DocumentCode
129240
Title
Evaluation of a novel reflector in a surface acoustic wave motor
Author
Deqing Kong ; Kurosawa, Minoru K.
Author_Institution
Tokyo Inst. of Technol., Yokohama, Japan
fYear
2014
fDate
3-6 Sept. 2014
Firstpage
862
Lastpage
865
Abstract
To study the efficiency of the substrate in a surface acoustic wave motor, a novel interdigital transducer reflector will be designed in this research. Then, to evaluate the performance of the novel stator, the stator is fabricated with the aid of the basic semiconductor planar process. At last, some measurements, including the recycle efficiency and vibration amplitude, are introduced.
Keywords
interdigital transducers; surface acoustic wave transducers; interdigital transducer reflector; recycle efficiency; semiconductor planar process; substrate efficiency; surface acoustic wave motor; vibration amplitude; Apertures; Recycling; Stators; Substrates; Surface acoustic waves; Vibrations; MEMS; actuator; interdigital transducer; surface acoustic wave; ultrasonic motor;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2014 IEEE International
Conference_Location
Chicago, IL
Type
conf
DOI
10.1109/ULTSYM.2014.0212
Filename
6931860
Link To Document