Title :
Evaluation of a novel reflector in a surface acoustic wave motor
Author :
Deqing Kong ; Kurosawa, Minoru K.
Author_Institution :
Tokyo Inst. of Technol., Yokohama, Japan
Abstract :
To study the efficiency of the substrate in a surface acoustic wave motor, a novel interdigital transducer reflector will be designed in this research. Then, to evaluate the performance of the novel stator, the stator is fabricated with the aid of the basic semiconductor planar process. At last, some measurements, including the recycle efficiency and vibration amplitude, are introduced.
Keywords :
interdigital transducers; surface acoustic wave transducers; interdigital transducer reflector; recycle efficiency; semiconductor planar process; substrate efficiency; surface acoustic wave motor; vibration amplitude; Apertures; Recycling; Stators; Substrates; Surface acoustic waves; Vibrations; MEMS; actuator; interdigital transducer; surface acoustic wave; ultrasonic motor;
Conference_Titel :
Ultrasonics Symposium (IUS), 2014 IEEE International
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.2014.0212
