Title :
Analysis of rayleigh surface acoustic waves propagation on piezoelectric phononic crystal with 3-D finite element model
Author :
Honglang Li ; Yahui Tian ; Yabing Ke ; Shitang He ; Wei Luo
Author_Institution :
Inst. of Acoust., Beijing, China
Abstract :
In this paper, two surface acoustic wave (SAW) delay line structures respectively with and without phononic crystals (PCs) were applied to analyze the propagation of Rayleigh SAW in the 2D piezoelectric PCs in theory. Three-dimensional (3D) finite element method (FEM) was adopted to analyze the model using the commercial software COMSOL MULTIPHYSICS. Experiments were also designed to verify the theoretical results, which show good consistency with the theoretical results. Thus this model can be used to analyze more other structures of 2D piezoelectric PCs, which can be applied to improve the performance of SAW devices.
Keywords :
Rayleigh waves; acoustic wave propagation; finite element analysis; phononic crystals; piezoelectricity; surface acoustic wave delay lines; surface acoustic waves; 2D piezoelectric phononic crystals; 3D finite element model; FEM; Rayleigh SAW propagation; Rayleigh surface acoustic wave propagation; SAW devices; software COMSOL MULTIPHYSICS; surface acoustic wave delay line structures; Analytical models; Crystals; Delays; Micromechanical devices; Surface acoustic waves; piezoelectric phononic crystals; surface acoustic wave; three-dimensional finite element method; transmission;
Conference_Titel :
Ultrasonics Symposium (IUS), 2014 IEEE International
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.2014.0632