Title :
Ultrasonic beam formation by pMUTs array using epitaxial PZT thin films on γ-Al2O3/Si substrates
Author :
Akai, Daisuke ; Ishida, Makoto ; Nishimura, M. ; Okada, Norio
Author_Institution :
Electron.-Inspired Interdiscipl. Res. Inst. (EIIRIS), Toyohashi Univ. of Technol., Toyohashi, Japan
Abstract :
We have proposed γ-Al2O3 thin films as an epitaxial buffer layer on Si substrates for obtaining epitaxial Pb(Zr,Ti)O3 (PZT) thin films and reported a 2-D ultrasonic image sensor and measurement and analysis of ultrasonic transmission using piezoelectric micromachined ultrasonic transducers (pMUTs) on γ-Al2O3/Si substrates. -6 dB beamwidth and sound pressure at 5 mm from surface of the 4 channel pMUT array were exbited 10 times larger than signle pMUT. These experimental results good agree with analysis results. It will be applied to design miniature 2-D pMUTs array ultrasonic probe.
Keywords :
epitaxial layers; lead compounds; ultrasonic imaging; ultrasonic transducer arrays; 2D ultrasonic image sensor; Al2O3-Si; PZT; epitaxial buffer layer; epitaxial thin films; pMUTs array; piezoelectric micromachined ultrasonic transducers; sound pressure; ultrasonic beam formation; ultrasonic transmission; Acoustic beams; Acoustics; Arrays; Finite element analysis; Silicon; Substrates; Transducers; PZT; annular array; pMUT;
Conference_Titel :
Ultrasonics Symposium (IUS), 2014 IEEE International
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.2014.0643
