Title :
A Compact Fiber-Tip Micro-Cavity Sensor for High-Pressure Measurement
Author :
Ma, Jun ; Ju, Jian ; Jin, Long ; Jin, Wei
Author_Institution :
Dept. of Electr. Eng., Hong Kong Polytech. Univ., Kowloon, China
Abstract :
A novel fiber-tip micro-cavity pressure sensor was fabricated by use of a fusion splicer and a pressurizing gas chamber. The fabrication process is simple and efficient without the need for careful cleaving, chemical etching, and bonding. Micro-cavities with wall thickness of a few micrometers demonstrated a pressure sensitivity of ~ 315 pm/MPa . The sensors have compact size, good mechanic strength, and high temperature stability up to 600°C, and may be potentially used for pressure sensing in a high-temperature environment.
Keywords :
fibre optic sensors; mechanical strength; micro-optics; microcavities; optical fibre fabrication; pressure sensors; thermal stability; compact fiber tip microcavity sensor; compact size; fusion splicer; high pressure measurement; high temperature stability; mechanic strength; pressure sensor; pressurizing gas chamber; Cavity resonators; Optical fiber sensors; Optical fibers; Optimized production technology; Sensitivity; Silicon compounds; Temperature sensors; Fiber tip; high-pressure sensing; interferometric sensor; micro-cavity;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2011.2164060
