Title :
Folded U-Shaped Microwire Technology for Ultra-Compact Three-Dimensional MMIC´s
Author :
Onodera, Kiyomitsu ; Hirano, Makoto ; Tokumitsu, Masami ; Toyoda, Ichihiko ; Nishikawa, Kenjiro ; Tokumitsu, Tsuneo
Author_Institution :
NTT System Electronics Laboratories, Atsugi-shi, Kanagawa 24ZZ-O 1, Japan.
fDate :
12/1/1996 12:00:00 AM
Keywords :
Fabrication; Gallium arsenide; Gold; Helium; Inductors; Insulation; MMICs; Metal-insulator structures; Polyimides; Radio frequency;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.1996.554655
