Title :
Thick film PZT/micromachined silicon accelerometer
Author :
Beeby, S.P. ; Ross, N. ; White, N.M.
Author_Institution :
Dept. of Electron. & Comput. Sci., Southampton Univ., UK
fDate :
11/11/1999 12:00:00 AM
Abstract :
A novel accelerometer fabricated by a combination of screen-printing and silicon micromachining is reported. This is the first device of its kind fabricated in this manner. Initial results indicate a sensitivity of 16 pCg-1 which compares very favourably with a sensitivity of 0.15 pCg-1 reported for thin-film devices
Keywords :
accelerometers; elemental semiconductors; lead compounds; micromachining; microsensors; piezoelectric transducers; silicon; thick film devices; PZT-Si; PbZrO3TiO3-Si; fabrication; screen printing; sensitivity; silicon micromachining; thick film PZT accelerometer;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19991398
