Title :
Thin photodiodes for a scintillator-silicon well detector
Author :
Allier, C.P. ; Hollander, R.W. ; Sarro, P.M. ; van Eijk, C.W.E.
Author_Institution :
Radiat. Technol. Group, Delft Univ. of Technol., Netherlands
Abstract :
In developing position sensitive radiation sensors, e.g. for medical imaging, low-gain silicon well sensors were made for the detection of scintillation light. The 3/spl times/3 arrays include N/sup ++/NP diodes, processed in the /spl sim/12 /spl mu/m thick membranes that remain after thinning of 530 /spl mu/m thick [100] silicon wafers by means of a potassium hydroxide (KOH) solution. A comparison is made for the light detection efficiency of these diodes with that of a 500 /spl mu/m thick PIN photodiode.
Keywords :
photodiodes; silicon radiation detectors; solid scintillation detectors; 12 mum; 500 micron; 530 micron; KOH solution; PIN photodiode; Si; Si well sensors; light detection efficiency; medical imaging; position sensitive detector; scintillator-Si well detector; thin photodiodes; Biomembranes; Diodes; Etching; Image sensors; Noise figure; Photodiodes; Sensor arrays; Silicon; Solid scintillation detectors; Spatial resolution;
Journal_Title :
Nuclear Science, IEEE Transactions on
