Title :
Calibration Protocol for Broadband Near-Field Microwave Microscopy
Author :
Farina, Marco ; Mencarelli, Davide ; Donato, Andrea Di ; Venanzoni, Giuseppe ; Morini, Antonio
Author_Institution :
Dipt. di Elettromagnetismo e Bioingegneria, Univ. Politec. delle Marche, Ancona, Italy
Abstract :
In this paper, we describe how to define and build a set of known loads to be used in near-field microwave microscopy. Such loads are necessary to set up a microwave calibration kit, enabling local quantitative measurements by the microscope. The proposed protocol is validated through the microscopy system we have recently developed that combines a scanning tunneling microscope and a 70-GHz vector network analyzer.
Keywords :
calibration; microwave measurement; network analysers; protocols; scanning tunnelling microscopy; broadband near-field microwave microscopy; calibration protocol; frequency 70 GHz; microwave calibration kit; scanning tunneling microscope; vector network analyzer; Calibration; Capacitance; Frequency measurement; Microscopy; Microwave imaging; Microwave measurements; Microwave theory and techniques; Calibration; microwave microscopy; nanotechnology; near-field imaging;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2011.2161328
