Title :
InAlGaAs/InP cylinder microlaser connected with two waveguides
Author :
Lin, J.-D. ; Huang, Yong-Zhen ; Yao, Q.-F. ; Lv, Xiao-Meng ; Yang, Yue-De ; Xiao, Jin-Long ; Du, Yun
Author_Institution :
State Key Lab. on Integrated Optoelectron., Chinese Acad. of Sci., Beijing, China
Abstract :
InAlGaAs/InP cylinder microlasers with radius of 15 μm, connected with two 2 μm-wide output waveguides, are fabricated by conventional photolithography and inductively coupled-plasma etching techniques. Room-temperature continuous-wave electrically injected singlemode operation is realised at the lasing wavelength of 1577 nm and sidemode suppression of 32 dB.
Keywords :
III-V semiconductors; aluminium compounds; indium compounds; laser modes; microcavity lasers; optical fabrication; optical waveguides; photolithography; semiconductor lasers; sputter etching; InAlGaAs-InP; continuous wave electrically injected singlemode operation; cylinder microlaser; inductively coupled plasma etching technique; optical waveguides; photolithography technique; size 15 mum; size 2 mum; temperature 293 K to 298 K; wavelength 1577 nm;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2011.2098
