Title :
A digital profiler for the characterization of semiconductors
Author :
Massé, Daniel J. ; Matsinger, Barbara ; Matsinger, John
Author_Institution :
Res. Div., Raytheon Co., Waltham, MA, USA
fDate :
3/1/1981 12:00:00 AM
Abstract :
Describes an automatic digital profiler which measures the density of free carriers versus depth in a semiconductor material. The instrument is controlled by a microprocessor in order to reduce operator intervention and eliminate some of the errors inherent in analog systems.
Keywords :
carrier density; digital instrumentation; doping profiles; semiconductor device testing; digital profiler; doping profile; free carrier density measurement; semiconductor characterization; Capacitance; Capacitance measurement; Materials; Schottky diodes; Semiconductor device measurement; Voltage measurement;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.1981.6312431
