DocumentCode
1295125
Title
Capacitive transducer for accurate displacement control
Author
Kosel, Peter B. ; Munro, Gregory S. ; Vaughan, Richard
Author_Institution
Dept. of Solid-State Electronics, Univ. of New South Wales, Kensington, NSW, Australia
Issue
2
fYear
1981
fDate
6/1/1981 12:00:00 AM
Firstpage
114
Lastpage
123
Abstract
The underlying theory, design, and operation are presented for an interdigitated capacitive displacement transducer supported on an air-bearing stage. This device provides a purely electrical means of displacement measurement and offers the possibility of being closely matched to the substrate against thermal perturbations. Tests on a prototype system show the basic capacitive transducer to have a sensitivity of 2.6 mV/μm and a position uncertainty of 4 nm set by thermal noise.
Keywords
position control; transducers; air-bearing stage; displacement control; interdigitated capacitive displacement transducer; position control; thermal noise; Capacitance; Electrodes; Glass; Gratings; Prototypes; Resists; Transducers;
fLanguage
English
Journal_Title
Instrumentation and Measurement, IEEE Transactions on
Publisher
ieee
ISSN
0018-9456
Type
jour
DOI
10.1109/TIM.1981.6312458
Filename
6312458
Link To Document