Title :
Capacitive transducer for accurate displacement control
Author :
Kosel, Peter B. ; Munro, Gregory S. ; Vaughan, Richard
Author_Institution :
Dept. of Solid-State Electronics, Univ. of New South Wales, Kensington, NSW, Australia
fDate :
6/1/1981 12:00:00 AM
Abstract :
The underlying theory, design, and operation are presented for an interdigitated capacitive displacement transducer supported on an air-bearing stage. This device provides a purely electrical means of displacement measurement and offers the possibility of being closely matched to the substrate against thermal perturbations. Tests on a prototype system show the basic capacitive transducer to have a sensitivity of 2.6 mV/μm and a position uncertainty of 4 nm set by thermal noise.
Keywords :
position control; transducers; air-bearing stage; displacement control; interdigitated capacitive displacement transducer; position control; thermal noise; Capacitance; Electrodes; Glass; Gratings; Prototypes; Resists; Transducers;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.1981.6312458
