Title :
Guest Editorial Special Issue on Advances on Plasma Processing for Semiconductor Manufacturing
Author :
Shannon, Steven ; Kinder, R. ; Paterson, Alan ; Rauf, Sakandar ; Ventzek, P. L. G.
Abstract :
The 12 papers in this special issue focus on surface interactions, plasma chemistry, and particle behavior near the surface.
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2009.2027934
