• DocumentCode
    1295982
  • Title

    Guest Editorial Special Issue on Advances on Plasma Processing for Semiconductor Manufacturing

  • Author

    Shannon, Steven ; Kinder, R. ; Paterson, Alan ; Rauf, Sakandar ; Ventzek, P. L. G.

  • Volume
    37
  • Issue
    9
  • fYear
    2009
  • Firstpage
    1662
  • Lastpage
    1664
  • Abstract
    The 12 papers in this special issue focus on surface interactions, plasma chemistry, and particle behavior near the surface.
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2009.2027934
  • Filename
    5200495
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1295982