Integration of PZT thin films on a microfluidic complex system

Author

Cazorla, P.-H. ; Fuchs, O. ; Cochet, M. ; Maubert, S. ; Le Rhun, G. ; Fouillet, Y. ; Defay, E.

Author_Institution

LETI, Univ. Grenoble Alpes, Grenoble, France

fYear

2014

fDate

3-6 Sept. 2014

Firstpage

491

Lastpage

494

Abstract

We present a new way to integrate state of the art sol-gel Pb(Zr,Ti)O₃ (PZT) thin-films on a microfluidic system and the first peristaltic micropump with active microvalves actuated by piezoelectric thin-films. Combination of both technologies enables to benefit of low voltage actuation and high precision. The micropump can produce a 3.6 μl/min flow for 24 V actuation voltage. It is a new step toward low consuming pumps for autonomous microfluidic systems, especially implanted devices for drug delivery.

Keywords

lead compounds; microactuators; microfluidics; micropumps; microvalves; piezoceramics; piezoelectric actuators; piezoelectric thin films; sol-gel processing; thin film devices; PZT; active microvalves; autonomous microfluidic systems; drug delivery; implanted devices; low voltage actuation; microfluidic complex system; peristaltic micropump; piezoelectric thin films; sol-gel PZT thin films; voltage 24 V; Acoustics; Actuators; Films; Microfluidics; Micropumps; Silicon; Valves; PZT sol-gel thin film; low voltage; micro-pump; peristaltic;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2014 IEEE International

Conference_Location

Chicago, IL

Type

conf

DOI

10.1109/ULTSYM.2014.0122

Filename

6932076