Lumped element modeling of CMUT arrays in collapsed mode

Author

Aydogdu, Elif ; Ozgurluk, Alper ; Atalar, Abdullah ; Koymen, Hayrettin

Author_Institution

ASELSAN, Turkey

fYear

2014

fDate

3-6 Sept. 2014

Firstpage

309

Lastpage

312

Abstract

This study focuses on modeling collapsed mode operation of CMUT arrays, and obtaining a small signal lumped element model for collapsed mode operation. Having the large signal model for single CMUT from previous studies, the mutual radiation impedance is presented for the collapsed mode, and a large signal model for a CMUT array is obtained for simulating the operation in both uncollapsed and collapsed modes. For faster computation, a small signal model for a CMUT cell is derived by linearizing the collapsed mode operation at a given bias point, and the computation time is reduced significantly. Using this model we are able to simulate a large array of collapsed CMUT cells.

Keywords

acoustic signal processing; array signal processing; ultrasonic transducer arrays; CMUT arrays; bias point; capacitive micromachined ultrasonic transducers; collapsed CMUT cell; collapsed mode operation; mutual radiation impedance; small signal lumped element model; Acoustics; Capacitance; Computational modeling; Customer relationship management; Force; Impedance; Integrated circuit modeling;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2014 IEEE International

Conference_Location

Chicago, IL

Type

conf

DOI

10.1109/ULTSYM.2014.0076

Filename

6932088