Title :
Dual-Mode Resonator and Switchless Reconfigurable Oscillator Based on Piezoelectric AlN MEMS Technology
Author :
Chengjie Zuo ; Van der Spiegel, Jan ; Piazza, Gianluca
Author_Institution :
Dept. of Electr. & Syst. Eng., Univ. of Pennsylvania, Philadelphia, PA, USA
Abstract :
For the first time, this work demonstrates a switchless dual-frequency (472 MHz and 1.94 GHz) reconfigurable CMOS oscillator using a single piezoelectric AlN microelectromechanical-systems resonator with coexisting S0 and S1 Lamb-wave modes of vibration. High performance (high quality factor Q and electromechanical coupling factor kt2 for a resonator and low phase noise for an oscillator) has been achieved for both the resonator and oscillator in terms of dual-mode operation. In particular, 1.94-GHz operation has the best phase noise performance at 1-MHz offset when compared with all previously reported CMOS oscillators that work at a similar frequency.
Keywords :
CMOS integrated circuits; III-V semiconductors; UHF oscillators; aluminium compounds; crystal resonators; micromechanical resonators; phase noise; surface acoustic waves; vibrations; wide band gap semiconductors; AlN; Lamb- wave mode; dual-mode resonator; frequency 1.94 GHz; frequency 472 MHz; phase noise performance; single piezoelectric MEMS resonator; single piezoelectric microelectromechanical-system resonator; switch-less dual-frequency reconfigurable CMOS oscillator; switchless reconfigurable oscillator; vibration; CMOS integrated circuits; Frequency measurement; Micromechanical devices; Phase noise; Resonant frequency; Switching circuits; Aluminum nitride (AlN); complementary metal–oxide–semiconductor (CMOS); dual frequency; dual mode; microelectromechanical systems (MEMS); oscillator; piezoelectric; reconfigurable; resonator; switchless;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2011.2162413
