Title :
Design, fabrication, and performance of infrared and visible vertical-cavity surface-emitting lasers
Author :
Chow, Weng W. ; Choquette, Kent D. ; Crawford, Mary H. ; Lear, Kevin L. ; Hadley, G Ronald
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
fDate :
10/1/1997 12:00:00 AM
Abstract :
This paper discusses the issues involving the design and fabrication of vertical-cavity surface-emitting lasers (VCSELs). A review of the basic experimental structures is given, with emphasis on recent developments in distributed Bragg reflectors, gain media, as well as current and optical confinement techniques. The paper describes present VCSEL performance, in particular, those involving selective oxidation and visible wavelength operation
Keywords :
distributed Bragg reflector lasers; ion implantation; optical fabrication; oxidation; semiconductor growth; semiconductor lasers; surface emitting lasers; VCSEL; current confinement techniques; design; distributed Bragg reflectors; experimental structures; fabrication; gain media; infrared vertical-cavity surface-emitting lasers; ion implantation; optical confinement techniques; selective oxidation; visible vertical-cavity surface-emitting lasers; visible wavelength operation; Laser beams; Laser modes; Mirrors; Optical design; Optical device fabrication; Optical resonators; Optical surface waves; Semiconductor lasers; Surface emitting lasers; Vertical cavity surface emitting lasers;
Journal_Title :
Quantum Electronics, IEEE Journal of
