DocumentCode
1298891
Title
Patterning for planar waveguides
Author
Ballato, J. ; Agarwala, M. ; Riman, R.E.
Author_Institution
Dept. of Ceramic Sci. & Eng., Rutgers Univ., Piscataway, NJ
Volume
33
Issue
1
fYear
1997
fDate
1/2/1997 12:00:00 AM
Firstpage
83
Lastpage
84
Abstract
The synthesis of planar strip geometries for planar waveguides by a layered manufacturing technique, called fused deposition modelling (FDMTM), is presented. Channels were deposited on silicon wafers by melting a thermoplastic polymer and extruding it through a small orifice. Sol-gel-derived, amorphous fluoride films were dip-coated into these channels and yielded straight, 1 mm strips on subsequent removal of the polymer
Keywords
coating techniques; fluoride glasses; integrated optoelectronics; optical fabrication; optical planar waveguides; OEIC; Si wafers; amorphous fluoride films; dip-coating; extruding; fused deposition modelling; layered manufacturing technique; patterned fluoride films; planar photonic devices; planar strip geometries; planar waveguide patterning; sol-gel-derived films; thermoplastic polymer;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19970034
Filename
555102
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