A pulsed mode micromachined flow sensor with temperature drift compensation

Author

Okulan, Nihat ; Henderson, H.Thurman ; Ahn, Chong H.

Author_Institution

Dept. of Electr. & Comput. Eng., Cincinnati Univ., OH, USA

Volume

47

Issue

2

fYear

2000

fDate

2/1/2000 12:00:00 AM

Firstpage

340

Lastpage

347

Abstract

A micromachined flow sensor for an integrated microfluidic system, operated in a pulse-modality, has been designed, fabricated and characterized. As a part of the complex of components constituting a generic fully integrated microfluidic system for autonomous biochemical analysis, this micro flow sensor has several unique operational and physical characteristics. A novel pulsing scheme compensates against any occurring temperature drift, resulting in high repeatability. Companion elements include microvalves, micropumps, microreservoirs, microchannels, etc., whose liquid (or gaseous) fluid dynamics must be characterized by the flow sensor described

Keywords

compensation; flow measurement; microfluidics; micromachining; microsensors; autonomous biochemical analysis; fluid dynamics; integrated microfluidic system; pulse-modality; pulsed mode micromachined flow sensor; pulsing scheme; repeatability; temperature drift; temperature drift compensation; Biochemical analysis; Biosensors; Fluid dynamics; Microchannel; Microfluidics; Micropumps; Microvalves; Sensor phenomena and characterization; Sensor systems; Temperature sensors;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/16.822278

Filename

822278