DocumentCode :
1300069
Title :
High power-durable RF-band SAW filters using single-crystal Al/Ti electrodes grown on 64°Y-X LiNbO3 substrates
Author :
Kimura, N. ; Nakano, M. ; Sato, K.
Author_Institution :
Adv. Products Dev. Center, TDK Corp., Chiba, Japan
Volume :
34
Issue :
1
fYear :
1998
fDate :
1/8/1998 12:00:00 AM
Firstpage :
131
Lastpage :
132
Abstract :
To improve the power-durability of RF-band SAW filters, single-crystal Al/Ti electrode films were successfully grown on 64°Y-X LiNbO3 substrates by the electron-beam vapour deposition technique. The time to failure of the single-crystal Al/Ti electrodes became approximately 680 times longer than that of Al-Cu alloy electrodes
Keywords :
aluminium; circuit reliability; electron beam deposition; failure analysis; lithium compounds; radiofrequency filters; surface acoustic wave filters; titanium; Al-Ti-LiNbO3; LiNbO3; RF-band SAW filters; electron-beam vapour deposition technique; power-durability; time to failure;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:19980105
Filename :
654572
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1300069
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