Title :
MOEMS Accelerometer Based on Microfiber Knot Resonator
Author :
Wu, Yu ; Zeng, Xu ; Rao, Yun-Jiang ; Gong, Yuan ; Hou, Chang-Lun ; Yang, Guo-Guang
Author_Institution :
Key Lab. of Broadband Opt. Fiber Transm. & Commun. Networks (Educ. Minist. of China), Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Abstract :
A microelectromechanical system (MEMS)-based optical accelerometer combined with a microfiber knot resonator (MKR) is proposed and demonstrated. The 386-mum-diameter MKR, fabricated by a 1.1-mu m-diameter microfiber, has a high quality factor (Q-factor) of 8500 and acts as the sensing device for vibration measurement of the MEMS structure. The experimental results show that such an accelerometer has a sensitivity of 654.7 mV/g, and a dynamic range of 20 g. This sensitivity can be further improved by increasing the Q-factor of the MKR, which can be achieved by optimizing the optical and geometrical parameters of the microfiber.
Keywords :
Q-factor; accelerometers; fibre optic sensors; micro-optomechanical devices; microsensors; optical resonators; vibration measurement; MOEMS accelerometer; accelerometer sensitivity; microelectromechanical system; microfiber knot resonator; optical accelerometer; quality factor; sensing device; vibration measurement; Accelerometer; high $Q$-factor; microfiber knot resonator (MKR); microoptoelectromechanical system (MOEMS);
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2009.2029556
