DocumentCode :
1301650
Title :
Effects of carrier confinement by InGaAs/GaAs heterointerface barrier on deep trap concentration profiling
Author :
Zhao, Jian H.
Author_Institution :
Dept. of Electr. & Comput. Eng., Rutgers Univ., Piscataway, NJ, USA
Volume :
37
Issue :
10
fYear :
1990
fDate :
10/1/1990 12:00:00 AM
Firstpage :
2158
Lastpage :
2164
Abstract :
Carrier confinement by the conduction-band barrier formed by the band discontinuity ΔEc has been observed in molecular beam epitaxy (MBE)-grown In0.1Ga0.9As/GaAs heterostructures as evidenced by the decrease of DLTS (deep level transient spectroscopy) peak height with increased filling pulse amplitude in a fixed-reverse-bias variable-filling-pulse DLTS study. A DLTS model including the ΔEc effects on trap profiling is developed by considering conduction-band barrier as a giant deep trap with an electron emission rate depending exponentially on ΔEc. The model explains quantitatively the experimental observations of the effects of ΔEc in the DLTS study and shows that an erroneous trap concentration profile may result from the conduction-band barrier if the standard DLTS model is used. It is shown that a 0.16-eV±0.01-eV electron trap reported to be located only at the heterointerface of In0.53Ga0.47As/InP may actually be a deep-trap characteristic of InGaAs with a fairly uniform trap concentration throughout the InGaAs epilayer
Keywords :
III-V semiconductors; deep level transient spectroscopy; gallium arsenide; indium compounds; molecular beam epitaxial growth; semiconductor epitaxial layers; semiconductor junctions; 0.16 eV; DLTS model; In0.1Ga0.9As-GaAs; MBE; band discontinuity; carrier confinement effects; conduction-band barrier; deep level transient spectroscopy; deep trap concentration; electron trap; erroneous trap concentration profile; filling pulse amplitude; giant deep trap; heterointerface barrier; molecular beam epitaxy; semiconductors; trap profiling; Carrier confinement; Electron emission; Electron traps; Filling; Gallium arsenide; Indium gallium arsenide; Indium phosphide; Molecular beam epitaxial growth; Semiconductor process modeling; Spectroscopy;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/16.59904
Filename :
59904
Link To Document :
بازگشت