Title :
Two-dimensional moveable optical pinhole with applications in single-detector imaging systems
Author_Institution :
Sch. of Eng., Swansea Univ., Swansea, UK
Abstract :
A MEMS electromagnetic driven 2D platform that is used to move an optical pinhole has been designed, fabricated, and characterised. The device is powered by Lorentz forces generated from current-varying wires in a magnetic field. A silicon-on-insulator micromachining process was used for the device prototyping. The dynamic performance of the device has been characterised. Based on the MEMS moveable optical pinhole, a new one-detector imaging system is proposed. The single-detector imaging system has potential applications in the infrared and terahertz spectrums.
Keywords :
Lorenz number; image sensors; magnetic fields; micromachining; micromechanical devices; silicon-on-insulator; Lorentz forces; MEMS electromagnetic driven 2D platform; MEMS moveable optical pinhole; current-varying wire; device prototyping; infrared spectrum; magnetic field; one-detector imaging system; silicon-on-insulator micromachining process; single-detector imaging system; terahertz spectrum; two-dimensional moveable optical pinhole;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2010.1299
