Two-dimensional moveable optical pinhole with applications in single-detector imaging systems

A MEMS electromagnetic driven 2D platform that is used to move an optical pinhole has been designed, fabricated, and characterised. The device is powered by Lorentz forces generated from current-varying wires in a magnetic field. A silicon-on-insulator micromachining process was used for the device prototyping. The dynamic performance of the device has been characterised. Based on the MEMS moveable optical pinhole, a new one-detector imaging system is proposed. The single-detector imaging system has potential applications in the infrared and terahertz spectrums.