DocumentCode
1303162
Title
Laser-direct-written capacitors and inductors for GaAs monolithic microwave integrated circuit trimming
Author
Chen, C.L. ; Black, J.G. ; Doran, S.P. ; Mahoney, L.J. ; Murphy, R.A. ; Ehrlich, D.J.
Author_Institution
MIT, Lexington, MA
Volume
24
Issue
22
fYear
1988
fDate
10/27/1988 12:00:00 AM
Firstpage
1396
Lastpage
1398
Abstract
Laser-direct-write deposition of tungsten and laser ablation techniques have been successfully used to modify monolithic capacitors and inductors fabricated on GaAs substrates. The properties of the tungsten inductors and capacitors have been characterised at microwave frequencies and are in good agreement with theory. The new techniques permit post-fabrication tuning with precision and versatility that are not achievable by any other method
Keywords
III-V semiconductors; MMIC; capacitors; gallium arsenide; inductors; integrated circuit technology; laser beam applications; tuning; GaAs; III-V semiconductors; W; laser ablation techniques; laser direct write deposition; monolithic capacitors; monolithic inductors; monolithic microwave integrated circuit; post-fabrication tuning; postfabrication tuning; trimming;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
Filename
82463
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