Title :
Characterization and imaging of SAW grooved transducer acoustic field by SLAM
Author :
Anisimkin, Vladimir I. ; Luprano, Vincenza A M ; Penza, Michele ; Montagna, Giovanni ; Morozov, Anatoly I.
Author_Institution :
Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
Abstract :
Quantitative characterization of the surface acoustic field radiated forward, backward, and in orthogonal directions by the grooved transducer, implemented onto a glass substrate, is accomplished by a scanning laser acoustic microscope (SLAM) operating at 31 MHz. The surface acoustic wave (SAW) amplitude is measured as a function of the number of grooves and the position of the bulk acoustic wave (BAW) transducer. The number of the operating grooves efficiently contributing to the SAW response is estimated. Remarkable reflection of the SAW beam between two identical gratings is observed.
Keywords :
acoustic field; acoustic microscopy; surface acoustic wave transducers; 31 MHz; SAW grooved transducer; acoustic field imaging; scanning laser acoustic microscope; Acoustic imaging; Acoustic measurements; Acoustic transducers; Acoustic waves; Glass; Microscopy; Position measurement; Simultaneous localization and mapping; Surface acoustic waves; Surface emitting lasers;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
