DocumentCode :
1304866
Title :
High-temperature langasite SAW oxygen sensor
Author :
Zheng, Peng ; Chin, Tao-Lun ; Greve, David ; Oppenheim, Irving ; Malone, Vanessa ; Cao, Limin
Author_Institution :
Nat. Energy Technol. Lab., Carnegie Mellon Univ., Pittsburgh, PA, USA
Volume :
58
Issue :
8
fYear :
2011
fDate :
8/1/2011 12:00:00 AM
Firstpage :
1538
Lastpage :
1540
Abstract :
High-temperature langasite SAW oxygen sensors using sputtered ZnO as a resistive gas-sensing layer were fabricated and tested. Sensitivity to oxygen gas was observed between 500°C to 700°C, with a sensitivity peak at about 625°C, consistent with the theoretical predictions of the acoustoelectric effect.
Keywords :
II-VI semiconductors; gallium compounds; gas sensors; lanthanum compounds; oxygen; surface acoustic wave sensors; wide band gap semiconductors; zinc compounds; O2; ZnO-La3Ga5SiO14; acoustoelectric effect; high-temperature langasite SAW oxygen sensor; oxygen gas sensitivity; resistive gas-sensing layer; temperature 500 degC to 700 degC; Conductivity; Films; Surface acoustic wave devices; Temperature measurement; Temperature sensors; Zinc oxide; Acoustics; Electric Conductivity; Hot Temperature; Oxygen; Sensitivity and Specificity; Silicates; Zinc Oxide;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/TUFFC.2011.1979
Filename :
5995209
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1304866
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