DocumentCode
1306523
Title
A comparison of the performance and reliability of wet-etched and dry-etched a-Si:H TFTs
Author
GadelRab, Serag M. ; Miri, Amir M. ; Chamberlain, Savvas G.
Author_Institution
Dept. of Electr. & Comput. Eng., Waterloo Univ., Ont., Canada
Volume
45
Issue
2
fYear
1998
fDate
2/1/1998 12:00:00 AM
Firstpage
560
Lastpage
563
Abstract
In this work, we compare the performance of wet-etched and dry-etched a-Si:H TFTs. We find that wet-etching of the a-Si:H layer increases the TFT mobility and reduces the threshold voltage. Furthermore, wet-etched TFTs display improved reliability characteristics in response to gate-bias stress. Our experiments indicate that there exists residual plasma-induced damage in dry-etched TFTs, even after a long post-etching annealing step
Keywords
MISFET; amorphous semiconductors; carrier mobility; etching; hydrogen; semiconductor device reliability; silicon; sputter etching; thin film transistors; Si:H; a-Si:H TFT; dry-etched TFT; gate-bias stress; mobility; performance comparison; post-etching annealing step; reliability characteristics; residual plasma-induced damage; threshold voltage; wet-etched TFT; Amorphous silicon; Annealing; Dry etching; Fabrication; Metallization; Plasma applications; Plasma devices; Plasma displays; Plasma properties; Thin film transistors;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.658694
Filename
658694
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