• DocumentCode
    1306555
  • Title

    SIMOX SOI for integrated circuit fabrication

  • Author

    Lam, Hon Wai

  • Volume
    3
  • Issue
    4
  • fYear
    1987
  • fDate
    7/1/1987 12:00:00 AM
  • Firstpage
    6
  • Lastpage
    11
  • Abstract
    The growing popularity of SIMOX SOI for integrated circuit (IC) fabrication results from its unique match to today´s IC needs and its compatibility with conventional IC manufacturing. This paper describes these attributes of SIMOX and shows how it is being applied today.
  • fLanguage
    English
  • Journal_Title
    Circuits and Devices Magazine, IEEE
  • Publisher
    ieee
  • ISSN
    8755-3996
  • Type

    jour

  • DOI
    10.1109/MCD.1987.6323126
  • Filename
    6323126
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1306555