DocumentCode :
1306555
Title :
SIMOX SOI for integrated circuit fabrication
Author :
Lam, Hon Wai
Volume :
3
Issue :
4
fYear :
1987
fDate :
7/1/1987 12:00:00 AM
Firstpage :
6
Lastpage :
11
Abstract :
The growing popularity of SIMOX SOI for integrated circuit (IC) fabrication results from its unique match to today´s IC needs and its compatibility with conventional IC manufacturing. This paper describes these attributes of SIMOX and shows how it is being applied today.
fLanguage :
English
Journal_Title :
Circuits and Devices Magazine, IEEE
Publisher :
ieee
ISSN :
8755-3996
Type :
jour
DOI :
10.1109/MCD.1987.6323126
Filename :
6323126
Link To Document :
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