Title :
Very low-loss GeO2-doped silica waveguides fabricated by flame hydrolysis deposition method
Author :
Kominato, Toshimi ; Ohmori, Yutaka ; Okazaki, Hiroshi ; Yasu, M.
Author_Institution :
NTT Opto-electron. Labs., Ibaraki, Japan
fDate :
3/1/1990 12:00:00 AM
Abstract :
GeO2-doped silica single-mode waveguides are fabricated by flame hydrolysis deposition and reactive ion-etching methods, and the loss value measured using a 40 cm long waveguide circuit. The fabricated single-mode waveguides with fourteen 90 degrees bends with a small bending radius of 5 mm have a very low loss value of 0.04 dB/cm, leading to an estimated propagation loss in the straight waveguides part of (0.01 +or- 0.01) dB/cm.
Keywords :
germanate glasses; optical losses; optical waveguides; silicon compounds; spray coatings; 40 cm; 5 mm; RIE; SiO 2:GeO 2 single mode waveguides; bending radius; flame hydrolysis deposition; loss value; low loss value; optical waveguides; propagation loss; reactive ion etching; reactive ion-etching; straight waveguides; waveguide circuit;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19900215
