Title :
Experimental validation of an accelerated method of oxide-trap-level characterization for predicting long term thermal effects in metal oxide semiconductor devices
Author :
Saigné, F. ; Dusseau, L. ; Fesquet, J. ; Gasiot, J. ; Ecoffet, R. ; David, J.P. ; Schrimpf, R.D. ; Galloway, K.F.
Author_Institution :
Centre d´´Electron., Univ. des Sci. et Tech. du Languedoc, Montpellier, France
fDate :
12/1/1997 12:00:00 AM
Abstract :
A new method for accelerated prediction of the long-term thermal annealing of bulk oxide trapped charge in the low dose rate space environment was presented in a previous paper. This method, based on the thermal detrapping characteristics is briefly reviewed. From a single experimental isochronal curve, the long term isothermal behavior of the device is predicted and compared with an experimental isothermal curve. Four different devices, obtained from four different manufacturers, were examined to demonstrate the validity of this method. In all four cases, the predicted long-term thermal behavior is in good agreement with experimental results. This method´s application is discussed for space missions
Keywords :
MIS devices; annealing; electron traps; accelerated method; bulk oxide trapped charge; isochronal annealing; isothermal annealing; long-term thermal annealing; low dose rate space environment; metal oxide semiconductor device; oxide trap level; thermal detrapping; Acceleration; Annealing; Electron traps; Isothermal processes; Lead compounds; Prediction methods; Semiconductor devices; Space charge; Space missions; Temperature;
Journal_Title :
Nuclear Science, IEEE Transactions on