DocumentCode :
1307853
Title :
The metal-semiconductor contact: an old device with a new future
Author :
Yu, Albert Y C
Author_Institution :
Fairchild Semiconductor
Volume :
7
Issue :
3
fYear :
1970
fDate :
3/1/1970 12:00:00 AM
Firstpage :
83
Lastpage :
89
Abstract :
Advances in process technology are making possible the fabrication of Schottky barriers with reliable, ideal electrical characteristics. With these advances, one can anticipate a rapid increase in the utilization of Schottky barriers, not only as discrete devices but also as a new component in integrated circuits. This article presents a unified picture that quantitatively characterizes both the Schottky barrier and ohmic contacts on silicon. Fabrication techniques and various applications are also discussed.
Keywords :
Contacts; Costs; Electric variables; Fabrication; Integrated circuit reliability; P-n junctions; Schottky barriers; Schottky diodes; Semiconductor diodes; Silicon;
fLanguage :
English
Journal_Title :
Spectrum, IEEE
Publisher :
ieee
ISSN :
0018-9235
Type :
jour
DOI :
10.1109/MSPEC.1970.5213256
Filename :
5213256
Link To Document :
بازگشت