A Characterization of the Performance of a MEMS Gyroscope in Acoustically Harsh Environments

Microelectromechanical systems (MEMS) gyroscopes are typically smaller and less expensive than their macroscale counterparts. For this reason, they are being used in many new applications, including in harsh environments. It has been well documented that the performance of unprotected MEMS gyroscopes can be deleteriously affected by exposure to mechanical shock or high-frequency vibrations. The results of this investigation experimentally demonstrate that MEMS gyroscopes are also susceptible to high-power high-frequency acoustic noise when acoustic energy frequency components are close to the resonating frequency of the gyroscope´s proof mass. Additionally, due to microfabrication tolerances and the resulting differences between otherwise identical devices, there can be significant differences in the acoustically sensitive bandwidth between otherwise identical MEMS gyroscopes. This phenomenon is characterized for the ADXRS300 MEMS gyroscope.