• DocumentCode
    1309378
  • Title

    Nondestructive measurement of phase velocity of surface acoustic waves using matched filters

  • Author

    Hirabayashi, M.

  • Author_Institution
    Device Technol. Res Lab., Sony Corp., Kanagawa, Japan
  • Volume
    26
  • Issue
    6
  • fYear
    1990
  • fDate
    3/15/1990 12:00:00 AM
  • Firstpage
    411
  • Lastpage
    412
  • Abstract
    A technique for measuring SAW velocity on unprocessed wafers placed on patterns of matched filters made on a glass plate is reported. The velocity measured on quartz agrees with the value measured destructively. The relative error of +or-110 p.p.m. means that this is currently the most precise nondestructive measuring technique.
  • Keywords
    matched filters; materials testing; nondestructive testing; quartz; surface acoustic waves; ultrasonic velocity measurement; glass plate; matched filters; measurement technique; measuring SAW velocity; nondestructive measurement; nondestructive measuring technique; phase velocity; quartz; surface acoustic waves; unprocessed wafers;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19900268
  • Filename
    82698
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1309378