Numerical Modeling of a Circularly Interdigitated Piezoelectric Microactuator

Accurate modeling and simulation techniques are vital for actuated membranes. Using multiphysical modeling techniques, coupled with variation in design parameters, accurate performance predictions can be realized. A 2-D axis-symmetric model of a circularly interdigitated piezoelectrically membrane is presented. The model includes the piezoelectric material and properties, as well as the membrane materials and properties, and incorporates various design considerations. This model also includes the electromechanical coupling for piezoelectric actuation and highlights a novel approach to take advantage of the higher d₃₃ piezoelectric coupling coefficient. Changes in parameters, including electrode pitch, electrode width, and piezoelectric material thickness, are evaluated.