VLSI parasitic capacitance determination by flux tubes

A two-dimensional numerical approach for calculating capacitance between two conductors through different dielectrics is developed. The approach uses Laplace´s equation in two dimensions to determine potentials on a grid system between the conductors. Equipotential lines are generated using these potentials and curvilinear squares can be formed to construct the flux tubes between the conductors. The application of Gauss´s law to these potentials provides the charge on a conductor and results in the determination of capacitance values.