DocumentCode
1311197
Title
Detached Glow Above a Titanium Hollow Cathode Sputter Source
Author
Niedrist, Raimund ; Schrittwieser, Roman
Author_Institution
Inst. for Ion Phys. & Appl. Phys., Univ. of Innsbruck, Innsbruck, Austria
Volume
39
Issue
11
fYear
2011
Firstpage
2568
Lastpage
2569
Abstract
A simple argon hollow cathode (HC) was investigated as a plasma source and a sputtering source for titanium. The HC consists of a Ti cylinder. There are two different modes of operation: a low-current discharge with the typical pink bluish argon glow and the high-current HC discharge mode. In the latter case, an intensive glow was observed at the upper end of the Ti cathode. Under certain conditions, this glow was observed to float freely between cathode and anode ring.
Keywords
anodes; cathodes; glow discharges; plasma sheaths; titanium; Ti; anode; high-current HC discharge mode; low-current discharge; pink bluish argon glow; plasma sheaths; plasma source; sputtering source; titanium hollow cathode sputter source; Argon; Cathodes; Discharges; Fasteners; Fault location; Plasmas; Sputtering; Gas discharge devices; glow discharge; plasma properties; plasma sheaths; plasma sources;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2011.2162855
Filename
6006536
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