DocumentCode
1311884
Title
Silicon-gate technology
Author
Vadasz, L.L. ; Grove, A.S. ; Rowe, T.A. ; Moore, G.E.
Author_Institution
Intel Corporation
Volume
6
Issue
10
fYear
1969
Firstpage
28
Lastpage
35
Abstract
Silicon-gate technology provides an advantageous approach for implementing large-scale integrated arrays of field-effect transistors. Its advantages¿principally resulting from the low threshold voltage and the self-aligned gate structure buried under an insulator¿ease the problem of interfacing these circuits to bipolar integrated circuits and increase both their performance and functional density, making MOS integrated circuits easier and more economical to use. This article reviews recent progress with this technology and shows its application to the construction of complex digital functions as illustrated by a memory circuit.
Keywords
Bipolar integrated circuits; Costs; Fabrication; Insulation; Integrated circuit interconnections; Integrated circuit technology; Large scale integration; Scanning electron microscopy; Silicon compounds; Silicon on insulator technology;
fLanguage
English
Journal_Title
Spectrum, IEEE
Publisher
ieee
ISSN
0018-9235
Type
jour
DOI
10.1109/MSPEC.1969.5214116
Filename
5214116
Link To Document