• DocumentCode
    1311884
  • Title

    Silicon-gate technology

  • Author

    Vadasz, L.L. ; Grove, A.S. ; Rowe, T.A. ; Moore, G.E.

  • Author_Institution
    Intel Corporation
  • Volume
    6
  • Issue
    10
  • fYear
    1969
  • Firstpage
    28
  • Lastpage
    35
  • Abstract
    Silicon-gate technology provides an advantageous approach for implementing large-scale integrated arrays of field-effect transistors. Its advantages¿principally resulting from the low threshold voltage and the self-aligned gate structure buried under an insulator¿ease the problem of interfacing these circuits to bipolar integrated circuits and increase both their performance and functional density, making MOS integrated circuits easier and more economical to use. This article reviews recent progress with this technology and shows its application to the construction of complex digital functions as illustrated by a memory circuit.
  • Keywords
    Bipolar integrated circuits; Costs; Fabrication; Insulation; Integrated circuit interconnections; Integrated circuit technology; Large scale integration; Scanning electron microscopy; Silicon compounds; Silicon on insulator technology;
  • fLanguage
    English
  • Journal_Title
    Spectrum, IEEE
  • Publisher
    ieee
  • ISSN
    0018-9235
  • Type

    jour

  • DOI
    10.1109/MSPEC.1969.5214116
  • Filename
    5214116