DocumentCode
1311922
Title
Thick films or thin?
Author
Thun, Rudolf E.
Author_Institution
Raytheon Company
Volume
6
Issue
10
fYear
1969
Firstpage
73
Lastpage
79
Abstract
It is sometimes difficult to decide between thick-film and thin-film technologies in the fabrication of hybrid integrated circuits consisting of a ceramic substrate with deposited passive components and attached active devices. In the case of thick films, the deposited pattern of conductors, resistors, capacitors, and inductors is applied to the substrate by screen-printing and firing special conductive, resistive, or dielectric pastes. Thin-film layers, on the other hand, are deposited in vacuum by evaporation or cathode-sputtering of appropriate source materials. This article discusses the advantages and disadvantages of both technologies as well as their application ranges.
Keywords
Conducting materials; Conductive films; Dielectric substrates; Dielectric thin films; Fabrication; Integrated circuit technology; Sputtering; Thick films; Thin film circuits; Thin film devices;
fLanguage
English
Journal_Title
Spectrum, IEEE
Publisher
ieee
ISSN
0018-9235
Type
jour
DOI
10.1109/MSPEC.1969.5214122
Filename
5214122
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