• DocumentCode
    1311922
  • Title

    Thick films or thin?

  • Author

    Thun, Rudolf E.

  • Author_Institution
    Raytheon Company
  • Volume
    6
  • Issue
    10
  • fYear
    1969
  • Firstpage
    73
  • Lastpage
    79
  • Abstract
    It is sometimes difficult to decide between thick-film and thin-film technologies in the fabrication of hybrid integrated circuits consisting of a ceramic substrate with deposited passive components and attached active devices. In the case of thick films, the deposited pattern of conductors, resistors, capacitors, and inductors is applied to the substrate by screen-printing and firing special conductive, resistive, or dielectric pastes. Thin-film layers, on the other hand, are deposited in vacuum by evaporation or cathode-sputtering of appropriate source materials. This article discusses the advantages and disadvantages of both technologies as well as their application ranges.
  • Keywords
    Conducting materials; Conductive films; Dielectric substrates; Dielectric thin films; Fabrication; Integrated circuit technology; Sputtering; Thick films; Thin film circuits; Thin film devices;
  • fLanguage
    English
  • Journal_Title
    Spectrum, IEEE
  • Publisher
    ieee
  • ISSN
    0018-9235
  • Type

    jour

  • DOI
    10.1109/MSPEC.1969.5214122
  • Filename
    5214122