Title :
Guided-wave optics in silicon-on-insulator technology
Author :
Jalali, B. ; Trinh, P.D. ; Yegnanarayanan, S. ; Coppinger, F.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
fDate :
10/1/1996 12:00:00 AM
Abstract :
Silicon-on-insulator (SOI) technology offers tremendous potential for the integration of optoelectronic functions on a silicon substrate. The authors have demonstrated integrated 3 dB optical directional couplers, a 5×9 star coupler, and a Mach-Zehnder wavelength demultiplexer using SOI rib waveguides. These devices show excellent performance characteristics and represent key components for the realisation of monolithic optoelectronic circuits in a silicon IC-compatible technology
Keywords :
demultiplexing equipment; integrated optics; optical communication equipment; optical directional couplers; optical waveguides; rib waveguides; silicon; silicon compounds; silicon-on-insulator; wavelength division multiplexing; 5×9 star coupler; Mach-Zehnder wavelength demultiplexer; SOI rib waveguides; SOI technology; SiO2-Si; dB optical directional couplers; guided-wave optics; monolithic optoelectronic circuits; optoelectronic functions; performance characteristics; silicon IC-compatible technology; silicon substrate; silicon-on-insulator technology;
Journal_Title :
Optoelectronics, IEE Proceedings -
DOI :
10.1049/ip-opt:19960675
