Optical Image Analysis of the Novel Ultra-Lightweight and High-Resolution MEMS X-Ray Optics

We have been developing novel microelectromechanical systems X-ray optics for future satellites. It can be ultra-lightweight and of high-resolution. For the first time, we fabricated a spherical test optics made of silicon. We used the dry etching and hot plastic deformation method. We conducted imaging tests to examine whether it can focus a parallel beam of light. Visible light was selected instead of X-rays because of the convenience of testing. The focusing was confirmed with a full-width at half-maximum focal size of 2 arcmin. Since the focus is affected by optical diffraction, a smaller focus can be expected in future X-ray imaging tests.