Title :
Integrity of Micro-Hotplates During High-Temperature Operation Monitored by Digital Holographic Microscopy
Author :
Lai, Y.W. ; Koukourakis, N. ; Gerhardt, N.C. ; Hofmann, M.R. ; Meyer, R. ; Hamann, S. ; Ehmann, M. ; Hackl, K. ; Darakis, E. ; Ludwig, A.
Author_Institution :
Res. Dept. Integrity of Small-Scale Syst./High-Temp. Mater., Ruhr-Univ. Bochum, Bochum, Germany
Abstract :
An investigation on the integrity of micro-hotplates using in situ digital holographic microscopy is reported. The surface topography and surface evolution of the devices during high-temperature operation (heating/cooling cycles) is measured with nanometer-scale resolution. A localized permanent out-of-plane surface deformation of 40% of the membrane thickness caused by the top measurement electrodes occurring after the first cycle is observed. The integrity-related issues caused by such a permanent deformation are discussed.
Keywords :
deformation; electrochemical electrodes; holography; micromechanical devices; surface topography; cooling cycle; digital holographic microscopy; heating cycle; high-temperature operation; measurement electrodes; microhotplates; nanometer scale resolution; permanent deformation; surface deformation; surface topography; Biomembranes; Cooling; Electrodes; Heating; Surface topography; Temperature measurement; Digital holography; micro-hotplates; microelectromechanical systems integrity; surface topography;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2010.2067442
