• DocumentCode
    1314565
  • Title

    Silicon device technology

  • Author

    Roberts, D.H.

  • Author_Institution
    The Plessey Company Limited
  • Volume
    5
  • Issue
    2
  • fYear
    1968
  • Firstpage
    101
  • Lastpage
    108
  • Abstract
    Despite the recent gains in silicon integrated circuit technology, further developments are necessary to provide lower costs, increased control capability, improvements in performance, and better overall understanding of the problems and potentials of this burgeoning field. The concept of optimum-scale integration is examined in detail.
  • Keywords
    Aluminum; Bipolar integrated circuits; Capacitance; Electronics industry; Fabrication; Integrated circuit technology; Isolation technology; Production; Silicon carbide; Silicon devices;
  • fLanguage
    English
  • Journal_Title
    Spectrum, IEEE
  • Publisher
    ieee
  • ISSN
    0018-9235
  • Type

    jour

  • DOI
    10.1109/MSPEC.1968.5214777
  • Filename
    5214777
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1314565