DocumentCode
1314593
Title
Detecting and preventing measurement errors
Author
Jenkins, Keith A.
Author_Institution
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
Volume
14
Issue
4
fYear
1997
Firstpage
78
Lastpage
86
Abstract
Modern e-beam probers may be as convenient to use as oscilloscopes, but their measurements can be misleading or even erroneous. The author warns of potential problems and suggests ways to prevent and cure faulty readings
Keywords
VLSI; electron beam testing; integrated circuit testing; measurement errors; VLSI circuits; e-beam probers; e-beam probing; faulty readings; measurement errors; Circuit testing; Crosstalk; Detectors; Electron beams; Instruments; Measurement errors; Probes; Scanning electron microscopy; Very large scale integration; Voltage;
fLanguage
English
Journal_Title
Design & Test of Computers, IEEE
Publisher
ieee
ISSN
0740-7475
Type
jour
DOI
10.1109/54.632884
Filename
632884
Link To Document